JPH0742087Y2 - 光学式表面粗さ測定装置 - Google Patents
光学式表面粗さ測定装置Info
- Publication number
- JPH0742087Y2 JPH0742087Y2 JP9578888U JP9578888U JPH0742087Y2 JP H0742087 Y2 JPH0742087 Y2 JP H0742087Y2 JP 9578888 U JP9578888 U JP 9578888U JP 9578888 U JP9578888 U JP 9578888U JP H0742087 Y2 JPH0742087 Y2 JP H0742087Y2
- Authority
- JP
- Japan
- Prior art keywords
- parallel beam
- light
- polarized light
- measured
- circular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 52
- 230000003746 surface roughness Effects 0.000 title claims description 31
- 238000005259 measurement Methods 0.000 claims description 37
- 230000010287 polarization Effects 0.000 claims description 22
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000008033 biological extinction Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 230000035559 beat frequency Effects 0.000 description 2
- 238000004439 roughness measurement Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9578888U JPH0742087Y2 (ja) | 1988-07-20 | 1988-07-20 | 光学式表面粗さ測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9578888U JPH0742087Y2 (ja) | 1988-07-20 | 1988-07-20 | 光学式表面粗さ測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0217604U JPH0217604U (en]) | 1990-02-05 |
| JPH0742087Y2 true JPH0742087Y2 (ja) | 1995-09-27 |
Family
ID=31320503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9578888U Expired - Lifetime JPH0742087Y2 (ja) | 1988-07-20 | 1988-07-20 | 光学式表面粗さ測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0742087Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2514577Y2 (ja) * | 1990-03-06 | 1996-10-23 | ブラザー工業株式会社 | 光学式表面粗さ測定装置 |
-
1988
- 1988-07-20 JP JP9578888U patent/JPH0742087Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0217604U (en]) | 1990-02-05 |
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